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dc.creatorCamacho León, Sergio
dc.creatorSERGIO CAMACHO LEON;213140es_MX
dc.date.accessioned2015-08-17T11:34:14Zen
dc.date.available2015-08-17T11:34:14Zen
dc.date.issued2010-05-01
dc.identifier.urihttp://hdl.handle.net/11285/572517en
dc.languageeng
dc.publisherInstituto Tecnológico y de Estudios Superiores de Monterrey
dc.relationInvestigadoreses_MX
dc.relationEstudianteses_MX
dc.relation.isformatofversión publicadaes_MX
dc.relation.ispartofREPOSITORIO NACIONAL CONACYTes_MX
dc.rightsinfo:eu-repo/semantics/openAccess
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/4.0*
dc.subject.classification7 INGENIERÍA Y TECNOLOGÍAes_MX
dc.titleDesign, fabrication and characterization of a high-speed, bimodal, CMOS-MEMS resonant scanner driven by temperature-gradient actuators
dc.typeTesis de doctorado
dc.contributor.departmentTecnológico de Monterrey, Campus Monterreyen
refterms.dateFOA2018-03-19T21:38:38Z
refterms.dateFOA2018-03-19T21:38:38Z


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