Design, fabrication and characterization of a high-speed, bimodal, CMOS-MEMS resonant scanner driven by temperature-gradient actuators

dc.contributor.author	Camacho León, Sergio
dc.creator	CAMACHO LEON, SERGIO; 213140	es_MX
dc.date.accessioned	2015-08-17T11:34:14Z	en
dc.date.available	2015-08-17T11:34:14Z	en
dc.date.issued	2010-05-01
dc.identifier.uri	http://hdl.handle.net/11285/572517	en
dc.format.medium	Texto	es_MX
dc.language.iso	eng
dc.publisher	Instituto Tecnológico y de Estudios Superiores de Monterrey
dc.relation.isFormatOf	versión publicada	es_MX
dc.relation.isreferencedby	REPOSITORIO NACIONAL CONACYT
dc.rights	openAccess
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/4.0	*
dc.subject.classification	INGENIERÍA Y TECNOLOGÍA; CIENCIAS TECNOLÓGICAS; TECNOLOGÍA DE LA INSTRUMENTACIÓN; INSTRUMENTOS DE MEDIDA DE LA TEMPERATURA	es_MX
dc.subject.lcsh	Tecnología / Technology
dc.subject.lcsh	Theory and practice of education--Higher education—Preparation of theses	es_MX
dc.title	Design, fabrication and characterization of a high-speed, bimodal, CMOS-MEMS resonant scanner driven by temperature-gradient actuators
dc.type	Tesis Doctorado / doctoral Thesis
dc.contributor.department	Tecnológico de Monterrey, Campus Monterrey	en
dc.audience.educationlevel	Investigadores/Researchers
refterms.dateFOA	2018-03-19T21:38:38Z
refterms.dateFOA	2018-03-19T21:38:38Z
dc.identificator	7
dc.identificator	33
dc.identificator	3311
dc.identificator	331116

Ciencias Exactas y Ciencias de la Salud 303
Ingeniería y Ciencias / Medicina y Ciencias de la Salud

Except where otherwise noted, this item's license is described as openAccess