Optical method for distance and displacement measurements of the probe-sample separation in a scanning near-field optical microscope

Héctor Rafael Siller Carrillo

dc.creator	Héctor Rafael Siller Carrillo
dc.date	2016
dc.date.accessioned	2018-10-19T13:37:36Z
dc.date.available	2018-10-19T13:37:36Z
dc.identifier.issn	21583226
dc.identifier.doi	10.1063/1.4947114
dc.identifier.uri	http://hdl.handle.net/11285/630619
dc.description	In this work, we present an alternative optical method to determine the probe-sample separation distance in a scanning near-field optical microscope. The experimental method is based in a Lloyd's mirror interferometer and offers a measurement precision deviation of ∼100 nm using digital image processing and numerical analysis. The technique can also be strategically combined with the characterization of piezoelectric actuators and stability evaluation of the optical system. It also opens the possibility for the development of an automatic approximation control system valid for probe-sample distances from 5 to 500 μm. © 2016 Author(s).
dc.language	eng
dc.publisher	American Institute of Physics Inc.
dc.relation	https://www.scopus.com/inward/record.uri?eid=2-s2.0-84968538056&doi=10.1063%2f1.4947114&partnerID=40&md5=7d2ee176e54e40074e139a98f976d9f3
dc.relation	Investigadores
dc.relation	Estudiantes
dc.rights	info:eu-repo/semantics/openAccess
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/4.0
dc.source	AIP Advances
dc.subject.classification	7 INGENIERÍA Y TECNOLOGÍA
dc.title	Optical method for distance and displacement measurements of the probe-sample separation in a scanning near-field optical microscope
dc.type	Artículo
dc.identifier.volume	6
dc.identifier.issue	4
refterms.dateFOA	2018-10-19T13:37:36Z

Files in this item

Name:: 9784422.pdf
Size:: 2.554Mb
Format:: PDF

View/Open

This item appears in the following Collection(s)

Artículo 1151
Article

Show simple item record

Except where otherwise noted, this item's license is described as info:eu-repo/semantics/openAccess