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Design space exploration and synthesis of a CMOS-MEMS Z-axis accelerometer.
(Instituto Tecnológico y de Estudios Superiores de Monterrey, 2010-12-01)
This thesis presents a design space exploration of a CMOS-MEMS z-axis accelerometer and an approach towards the development of a synthesis procedure of this type of accelerometer. In this work, a CMOS-MEMS z-axis accelerometer ...