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A CMOS cantilever platform using adsorption-induced surface stress and piezoresistive transduction for biosensing
(Instituto Tecnológico y de Estudios Superiores de Monterrey, 2012-12-01)
This work proposes a biosensing platform based on a microcantilever operating in static mode. The microcantilever transforms the adsorption-induced surface stress into a deflection which is then transformed in an electrical ...